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| عنوان فارسی مقاله: |
دستگاه CMOS‑MEMS IR مبتنی بر ترموکوپل های دو لایه ای |
| عنوان انگلیسی مقاله: |
A CMOS‑MEMS IR device based on double‑layer thermocouples |
چکیده
1. مقدمه
2. طرح ساختاری
2.1. نظریه ی ترموپیلی
2.2. طراحی ترموپیل
3. تولید و ساخت
4. سنجش ها و بحث و گفتگو
4.1 حس کنندگی تشعشعات IR
4.2 سنجش دمایی
4.3 سنجش فشار خلاء
5. نتیجه گیری
تقدیر و تشکرات
کلمات کلیدی :
CMOS Compatible Midinfrared Wavelength-Selective Thermopile for ...ieeexplore.ieee.org/document/6824166/by H Zhou - 2015 - Related articlesThe devices are all fabricated in CMOS compatible process. ... mid-infrared (mid-IR) thermopile sensor comprising a stacked double layer ... of infrared, focusing mainly on thermopile based infrared sensors and related applications. ... of several MEMS sensors operating in harsh environment, like pressure, IR gas detection, ...Thermal simulation and design optimization of a thermopile infrared ...iopscience.iop.org/article/10.1088/0960-1317/19/5/055016/metaby CG Mattsson - 2009 - Cited by 22 - Related articlesApr 28, 2009 - A thermopile detector with an SU-8-based closed membrane and ... automatic device optimization, based on iterative device simulations ... double polycrystalline silicon layers based on the CMOS process ... Fully quantitative characterization of CMOS-MEMS polysilicon/titanium thermopile infrared sensorsGroup of Chengkuo Lee | Publications - ECE@NUShttps://www.ece.nus.edu.sg/stfpage/elelc/publications.htmlChengkuo Lee, MEMS-based devices, 17th OptoElectronics and .... CMOS-Compatible Mo-AlN-Mo Platform for Metamaterial Based Mid-IR Absorber, ACS ..... infrared sensor using stacked double polycrystalline silicon layers based on CMOS ...[PDF]Multi-field simulations and characterization of CMOS-MEMS high ...https://www2.warwick.ac.uk/.../sensorsanddevices/.../jmm_2008_cmos-mems_smart_...May 28, 2008 - of silicon-based chemoresistive devices using oxide/nitride membranes, referred ... monolithic integration of CMOS micro-hotplate gas sensors or micro-system ..... For a double-layer membrane with thickness h1 and h2, if under a ..... Amega 880 infrared camera based on an average emissivity of 0.2 for the ...