| عنوان فارسی مقاله: |
بررسی ویژگی های دینامیکی و شبیه سازی میکرومیرورهای پیچشیMEMS |
| عنوان انگلیسی مقاله: |
A study of dynamic characteristics and simulation of MEMS torsional micromirrors |
چکیده
1.مقدمه
2.مدل نظری
3.راه حل تحلیلی معادلات ثابت
4.نتیجه گیری
کلمات کلیدی :
Measurements and Simulation of the Dynamic Characteristics of Micro ...ieeexplore.ieee.org/document/4783828/by WH Gau - 2008 - Related articlesA cross-shaped torsion mirror, fabricated by a micro-machining process, was analyzed by finite element analysis with ANSYS and COMSOL software packages.The Dynamic Characteristics of MEMS Driven by Laser Beam ...proceedings.asmedigitalcollection.asme.org/proceeding.aspx?articleid=1594871by Y Arai - 2003 - Related articlesThe Dynamic Characteristics of MEMS Driven by Laser Beam ... Such problems and mechanical characteristics of microstructures that are driven by ... Design and Simulation of a Novel Electrostatic Tunable MEMS Inductor for RF Apllications.Dynamic characteristics of circular and square graphene diaphragm ...https://ukm.pure.elsevier.com/.../dynamic-characteristics-of-circular-and-square-graphen...by HM Mustapha - 2017 - Related articlesThis research focuses on the diaphragm design of the graphene MEMS capacitive microphone. Simulation part will be first involved in order to get the optimum ...