| عنوان فارسی مقاله: | کنترل بازخورد آماری یک فرایند اچ پلاسما |
| عنوان انگلیسی مقاله: | Statistical Feedback Control of a Plasma Etch Process |
چکیده
۱.پیشگفتار
۲.سناریوها و مدل‌های تجهیزات
راه اندازی آزمایشی
واکنش‌ها و روش‌های سنجش (یا اندازه‌گیری)
مدلبندی تجهیزات
۳.استراتژی کنترل
مدل مبتنی بر SQC و الگوی سازگاری
۴.آزمایش‌ها و نتایج
آزمایشات تایید SPC
نتایج
۵.نتیجه‌گیری
ضمیمه‌ی
کلمات کلیدی :
Feedback control of plasma etching reactors for improved etching ... https://www.researchgate.net/.../222124053_Feedback_control_of_plasma_etching_reac... This work focuses on the design and implementation of a feedback control system on a parallel electrode plasma etching (PE) process with showerhead ... [PDF]Feedback control of plasma etching reactors for ... - UCLA PDC Lab pdclab.seas.ucla.edu/.../AArmaou_JBaker_PDChristofides_CES_2001_56_Feedback_... This work focuses on the design and implementation of a feedback control system on a parallel electrode plasma etching (PE) process with showerhead ... [PDF]Estimation and Control in Semiconductor Etch: Practice and ... - CORE https://core.ac.uk/download/pdf/11524740.pdf by JV Ringwood - 2010 - Cited by 26 - Related articles open-loop process with little direct feedback control. ... ment feedback a prerequisite for control. .... accurate diagnosis and control of plasma etch processes. [PDF]Virtual Metrology for Plasma Etch Processes - Maynooth University ... eprints.maynoothuniversity.ie/2657/1/Thesis_Final_ShaneLynn.pdf by S Lynn - 2011 - Cited by 7 - Related articles Plasma processes can present difficult control challenges due to time-varying dynamics and a lack of ... for plasma processes, with a particular focus on semiconductor plasma etch. ...... 4.6 Detailed feed-forward/feed-back control structure.