| عنوان فارسی مقاله: | روان کنندگی سیلیکون های پلی کریستالهای MEMS از طریق یک پوشش نازک کاربید سیلیکون |
| عنوان انگلیسی مقاله: | Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating |
کلمات کلیدی :
Scholarly articles for polycrystalline silicon MEMS via a thin silicon carbide coating Silicon carbide as a new MEMS technology - Sarro - Cited by 402 Silicon carbide MEMS for harsh environments - Mehregany - Cited by 397 … -temperature CVD process for silicon carbide MEMS - Stoldt - Cited by 114 Search Results Lubrication of polycrystalline silicon MEMS via a thin silicon carbide ... www.sciencedirect.com/science/article/pii/S0924424713000496 by I Laboriante - 2013 - Cited by 10 - Related articles Jan 24, 2013 - One effective way to resolve these reliability issues is by coating the wafers with a thin silicon carbide layer across the surface to reduce the ... Lubrication of polycrystalline silicon MEMS via a thin silicon carbide ... https://www.researchgate.net/.../257347347_Lubrication_of_polycrystalline_silicon_ME... Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating on ResearchGate, the professional network for scientists. [PDF]Lubrication of polycrystalline silicon MEMS via a thin silicon carbide ... tarjomefa.com/wp-content/uploads/2016/09/5239-English.pdf by I Laboriante - 2013 - Cited by 10 - Related articles Sensors and Actuators A: Physical journal homepage: www.elsevier.com/locate/sna. Lubrication of polycrystalline silicon MEMS via a thin silicon carbide coating. Suppression of wear in cyclically loaded polycrystalline silicon MEMS ... ieeexplore.ieee.org/document/5969544/ by I Laboriante - 2011 - Cited by 1 - Related articles The surfaces of a microfabricated polysilicon test structure, designed to measure ... loaded polycrystalline silicon MEMS via a thin silicon carbide coating. Polycrystalline silicon carbide for surface micromachining - IEEE Xplore ieeexplore.ieee.org/document/493986 by AJ Fleischman - 1996 - Cited by 29 - Related articles Polycrystalline silicon carbide (poly-SiC) films have been deposited on polysilicon-coated, 4-inch silicon wafers in ... vapor deposition (APCVD) reactor using parameters similar to those developed by our group for single crystal SiC growth. ... Published in: Micro Electro Mechanical Systems, 1996, MEMS '96, Proceedings. Low-stress, heavily-doped polycrystalline silicon carbide for MEMS ... ieeexplore.ieee.org/document/1453964/ by J Trevino - Cited by 20 - Related articles Low-stress, heavily-doped polycrystalline silicon carbide for MEMS applications ... SiO/sub 2/ coated Si wafers at 900/spl deg/C using dichlorosilane (SiH/sub 2/Cl/sub ... thus illustrating the chemical and thermal durability of the thin SiC films. [PDF]silicon carbide for enhanced mems reliability - Berkeley Sensor ... www-bsac.eecs.berkeley.edu/publications/search/send_publication_pdf2client.php?... characterized using micromachined cantilever beam arrays, doubly clamped ... structural layer or thin film coating significantly reduces stiction of free-standing ... advances in polycrystalline SiC technology for MEMS [1,2] enable the use of SiC ... [PDF]Silicon Carbide Thin Films using 1,3-Disilabutane Single Precursor for ... www-bsac.eecs.berkeley.edu/publications/search/send_publication_pdf2client.php?... MEMS structural layers for high-frequency resonators and thin film coating layers to improve anti-stiction properties and harsh environment performance. ... are summarized. Next, plasma etch chemistries with selectivity to poly-SiC over silicon. Lubrication of polycrystalline silicon MEMS via a thin silicon carbide ... www.siliconcarbidewafer.com/silicon-carbide-film.html Home > News > Lubrication of polycrystalline silicon MEMS via a thin silicon ... Adhesion forces in SiC-coated interfaces as a function of apparent area of contact ... Silicon Carbide as a Material for Biomedical ... - Semantic Scholar https://pdfs.semanticscholar.org/4ff3/b6deb1715895ab9831ae097e6c5ee75ae0ea.pdf by CA Zorman - 2009 - Cited by 12 - Related articles Abstract- Silicon Carbide (SiC) is emerging as an enabling material for biomedical ... SiC is an attractive structural material for MEMS and. NEMS applications due to .... pressure for undoped poly-SiC films deposited using the dual precursor approach [9]. ..... electrode made from polyimide and coated with a thin a-SiC layer.